Invention Grant
- Patent Title: Composite structure, semiconductor manufacturing apparatus and display manufacturing apparatus provided with composite structure
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Application No.: US16296934Application Date: 2019-03-08
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Publication No.: US10759710B2Publication Date: 2020-09-01
- Inventor: Junichi Iwasawa , Hiroaki Ashizawa , Takuma Wada , Ryoto Takizawa , Toshihiro Aoshima , Yuuki Takahashi , Atsushi Kinjo
- Applicant: TOTO LTD.
- Applicant Address: JP Fukuoka
- Assignee: Toto Ltd.
- Current Assignee: Toto Ltd.
- Current Assignee Address: JP Fukuoka
- Agency: Carrier Blackman & Associates, P.C.
- Agent Joseph P. Carrier; William D. Blackman
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7adbc5d2 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7e37eb83 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2f6e4ea0 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@51c7c5ef com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@75166f50 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@34bcf982
- Main IPC: B32B9/00
- IPC: B32B9/00 ; C04B35/505 ; C01B11/24 ; C01F7/02 ; C01G25/02 ; C04B35/622 ; H01J37/28 ; H01L21/67 ; H01L21/687 ; C01F17/206 ; C01F17/265
Abstract:
Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.
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