Invention Grant
- Patent Title: Method for protecting a MEMS unit against infrared investigations and MEMS unit
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Application No.: US15936038Application Date: 2018-03-26
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Publication No.: US10759657B2Publication Date: 2020-09-01
- Inventor: Michael Curcic , Oliver Willers , Sven Zinober , Ulrich Kunz
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1262c153
- Main IPC: B81B7/00
- IPC: B81B7/00 ; G02B1/14 ; B81C1/00 ; H04L9/08
Abstract:
A method is provided for protecting a MEMS unit against infrared investigations, at least one layer being built into the structure of the MEMS unit or at least one layer being applied on a surface of the MEMS unit. The at least one layer absorbs, reflects or diffusely scatters more than 50%, in particular more than 90% of an infrared light incident upon it.
Public/Granted literature
- US20180299589A1 METHOD FOR PROTECTING A MEMS UNIT AGAINST INFRARED INVESTIGATIONS AND MEMS UNIT Public/Granted day:2018-10-18
Information query
