Invention Grant
- Patent Title: Narrowband laser apparatus and spectral linewidth measuring apparatus
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Application No.: US15973896Application Date: 2018-05-08
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Publication No.: US10741991B2Publication Date: 2020-08-11
- Inventor: Takahito Kumazaki , Keisuke Ishida , Hiroshi Furusato
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/137
- IPC: H01S3/137 ; G01J3/28 ; G03F7/20 ; G01J3/02 ; G01J3/26 ; G01J3/10 ; H01S3/034 ; H01S3/08 ; H01S3/10 ; H01S3/23 ; H01S3/225 ; H01S3/00 ; H01S3/106

Abstract:
A narrowband laser apparatus may be provided with a laser resonator including optical elements for narrowing a spectral linewidth, a spectrometer configured to detect spectral intensity distributions of multiple pulses included in a pulsed laser beam output from the laser resonator, a spectral waveform producer configured to produce a spectral waveform by adding up the spectral intensity distributions of the multiple pulses, a device function storage configured to store a device function of the spectrometer, a wavelength frequency function generator configured to generate a wavelength frequency function which represents a frequency distribution of center wavelengths of the multiple pulses, and a deconvolution processor configured to perform deconvolution processing on the spectral waveform with the device function and the wavelength frequency function.
Public/Granted literature
- US20180254600A1 NARROWBAND LASER APPARATUS AND SPECTRAL LINEWIDTH MEASURING APPARATUS Public/Granted day:2018-09-06
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