Invention Grant
- Patent Title: Resistive memory with amorphous silicon filaments
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Application No.: US16292894Application Date: 2019-03-05
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Publication No.: US10741754B2Publication Date: 2020-08-11
- Inventor: Alexander Reznicek , Bahman Hekmatshoartabari
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent L. Jeffrey Kelly
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00 ; H01L23/528

Abstract:
A method for manufacturing a semiconductor memory device includes forming a first silicon layer on a bottom conductive layer, transforming the first silicon layer into a first polysilicon layer, forming a second silicon layer stacked on the first polysilicon layer, and a third silicon layer stacked on the second silicon layer, transforming the second and third silicon layers into second and third polysilicon layers, wherein the first and third polysilicon layers have a first doping type, and the second polysilicon layer has a second doping type different from the first doping type, forming an amorphous silicon layer on the third polysilicon layer, and forming a top conductive layer on the amorphous silicon layer.
Public/Granted literature
- US20190198757A1 RESISTIVE MEMORY WITH AMORPHOUS SILICON FILAMENTS Public/Granted day:2019-06-27
Information query
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