Invention Grant
- Patent Title: Sub-thermal switching slope vertical field effect transistor with dual-gate feedback loop mechanism
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Application No.: US16597428Application Date: 2019-10-09
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Publication No.: US10741675B2Publication Date: 2020-08-11
- Inventor: Julien Frougier , Ruilong Xie , Steven Bentley , Kangguo Cheng , Nicolas Loubet , Pietro Montanini
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Garg Law Firm, PLLC
- Agent Rakesh Garg; Joseph Petrokaitis
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/423 ; H01L29/78

Abstract:
Fabricating a feedback field effect transistor includes receiving a semiconductor structure including a substrate, a first source/drain disposed on the substrate, a fin disposed on the first source/drain, and a hard mask disposed on a top surface of the fin. A bottom spacer is formed on a portion of the first source/drain. A first gate is formed upon the bottom spacer. A sacrificial spacer is formed upon the first gate, a gate spacer is formed on the first gate from the sacrificial spacer, and a second gate is formed on the gate spacer. The gate spacer is disposed between the first gate and the second gate. A top spacer is formed around portions of the second gate and hard mask, a recess is formed in the top spacer and hard mask, and a second source/drain is formed in the recess.
Public/Granted literature
- US20200044057A1 SUB-THERMAL SWITCHING SLOPE VERTICAL FIELD EFFECT TRANSISTOR WITH DUAL-GATE FEEDBACK LOOP MECHANISM Public/Granted day:2020-02-06
Information query
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