Conductive layer, thin film transistor and manufacturing methods therefor, array substrate and display device
Abstract:
The present disclosure relates to a conductive layer, a thin film transistor and manufacturing methods therefor, an array substrate and a display device, in the field of displays. The conductive layer comprises: a metal layer and an organophosphorus-metal complex covering the metal layer. In the embodiments of the present disclosure, the organophosphorus-metal complex is manufactured on the surface of the metal layer to form the conductive layer. The conductive layer is adopted as an electrode material. In one aspect, the organophosphorus-metal complex has conductivity and can prevent the surface of metal from making contact with oxygen, thereby avoiding metal oxidation under the premise of not affecting the performances of the electrode when serving as a material of the electrode in a TFT. In the other aspect, the organophosphorus-metal complex can increase a binding force between the metal and photoresist and avoids stripping of the photoresist. Therefore, etching liquid is prevented from etching the metal in a position without the need of etching. The conductive layer provided by the present disclosure has the performances in the above two aspects. Therefore, the stability and electronic transmission performances of the electrode can be improved by adopting such a conductive layer to manufacture the electrode of the thin film transistor.
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