Invention Grant
- Patent Title: Image sensing device and manufacturing method thereof
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Application No.: US16223712Application Date: 2018-12-18
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Publication No.: US10741601B2Publication Date: 2020-08-11
- Inventor: Chih-Chang Huang , Chi-Ming Lu , Jian-Ming Chen , Jung-Chih Tsao , Yao-Hsiang Liang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/768

Abstract:
Some embodiments of the present disclosure provide a back side illuminated (BSI) image sensor. The back side illuminated (BSI) image sensor includes a semiconductive substrate and an interlayer dielectric (ILD) layer at a front side of the semiconductive substrate. The ILD layer includes a dielectric layer over the semiconductive substrate and a contact partially buried inside the semiconductive substrate. The contact includes a silicide layer including a predetermined thickness proximately in a range from about 600 angstroms to about 1200 angstroms.
Public/Granted literature
- US20190148442A1 IMAGE SENSING DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2019-05-16
Information query
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