Invention Grant
- Patent Title: Image sensing device and method for forming the same
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Application No.: US16515601Application Date: 2019-07-18
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Publication No.: US10741596B2Publication Date: 2020-08-11
- Inventor: Chul Kim , Young Woong Do , Won Jin Kim , Jong Hwan Kim , Sung Jun Park , Moung Seok Baek , Ju Sang Lee , Seong Hoe Jeong
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Perkins Coie LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@71db0370
- Main IPC: H01L27/146
- IPC: H01L27/146
Abstract:
An image sensing device and a method for forming the same are disclosed. The image sensing device includes a substrate including one or more photoelectric conversion elements, and a grid structure disposed over the substrate. The grid structure includes an air layer, a support film formed over the air layer, and a capping film formed at side surfaces of the air layer and the support film and at a top surface of the support film.
Public/Granted literature
- US20200212095A1 IMAGE SENSING DEVICE AND METHOD FOR FORMING THE SAME Public/Granted day:2020-07-02
Information query
IPC分类:
