Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16293969Application Date: 2019-03-06
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Publication No.: US10741580B2Publication Date: 2020-08-11
- Inventor: Hideto Takekida
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3828958f
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11565 ; H01L27/1157 ; H01L27/11573 ; H01L23/522 ; H01L29/36 ; H01L21/28 ; H01L27/11526 ; H01L27/11556 ; H01L27/11524 ; H01L27/11519

Abstract:
A semiconductor memory device comprises: a substrate; a first conductive layer and a second conductive layer arranged in a first direction crossing a surface of the substrate and extending in a second direction crossing the first direction, the first conductive layer being closer to the substrate than the second conductive layer, a length in the second direction of the first conductive layer being greater than the length of the second conductive layer; a first semiconductor film extending in the first direction and facing the first and second conductive layers; a second semiconductor film interposed between ends of the first and second conductive layers, extending in the first direction, and facing the first conductive layer; a first wiring farther from the substrate than the first semiconductor film and being electrically connected to the first semiconductor film; and a second wiring farther from the substrate than the second semiconductor film and being electrically connected to the second semiconductor film.
Public/Granted literature
- US20200075626A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-03-05
Information query
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