Invention Grant
- Patent Title: Semiconductor device and a method of manufacturing the same
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Application No.: US16267307Application Date: 2019-02-04
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Publication No.: US10741517B2Publication Date: 2020-08-11
- Inventor: Shinya Suzuki
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Tokyo
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Tokyo
- Agency: SGPatents PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@21609d59
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/768 ; H01L23/522 ; H01L23/485 ; H01L21/02 ; H01L21/3105 ; H01L21/311 ; H01L23/528 ; H01L27/13 ; H01L29/78 ; G02F1/1345 ; G02F1/133 ; G02F1/1333 ; G02F1/1343 ; G02F1/1362 ; G02F1/1368

Abstract:
A technique which improves the reliability in coupling between a bump electrode of a semiconductor chip and wiring of a mounting substrate, more particularly a technique which guarantees the flatness of a bump electrode even when wiring lies in a top wiring layer under the bump electrode, thereby improving the reliability in coupling between the bump electrode and the wiring formed on a glass substrate. Wiring, comprised of a power line or signal line, and a dummy pattern are formed in a top wiring layer beneath a non-overlap region of a bump electrode. The dummy pattern is located to fill the space between wirings to reduce irregularities caused by the wirings and space in the top wiring layer. A surface protection film formed to cover the top wiring layer is flattened by CMP.
Public/Granted literature
- US20190172808A1 SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME Public/Granted day:2019-06-06
Information query
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