Invention Grant
- Patent Title: Systems, apparatus, and methods for a load port door opener
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Application No.: US15426037Application Date: 2017-02-06
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Publication No.: US10741432B2Publication Date: 2020-08-11
- Inventor: David T. Blahnik
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677 ; H01L21/673

Abstract:
Embodiments provide systems, apparatus, and methods for an improved load port operable to purge air trapped between the substrate carrier door and the carrier door opener. Embodiments include a docking tray adapted to receive a substrate carrier including a carrier door; a door opener adjacent the docking tray and adapted to couple to the carrier door and to open the carrier door, wherein the door opener includes a purge gas inlet port; at least one exhaust outlet port, and a ridge wall defining a perimeter channel in cooperation with a docked substrate carrier, wherein the ridge wall includes openings proximate the ports and wherein the door opener further includes a diverter structure disposed to direct purge gas from the inlet port to at least one of the openings in the ridge wall. Numerous additional aspects are disclosed.
Public/Granted literature
- US20180226284A1 SYSTEMS, APPARATUS, AND METHODS FOR A LOAD PORT DOOR OPENER Public/Granted day:2018-08-09
Information query
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