Invention Grant
- Patent Title: Semiconductor manufacturing apparatus
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Application No.: US14847374Application Date: 2015-09-08
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Publication No.: US10738389B2Publication Date: 2020-08-11
- Inventor: Takashi Izumi , Fumitoshi Ikegaya
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: C25D7/12
- IPC: C25D7/12 ; C25D3/38 ; C25D21/14 ; C25D21/18 ; C25D21/12 ; H05K3/42 ; C25D21/16

Abstract:
A semiconductor manufacturing apparatus according to an embodiment comprises a container contains a mixed solution that includes a processing solution for plating processing of a substrate and an additive and being capable of draining a part of the mixed solution when a first condition is satisfied. A first supplier supplies the processing solution to the container. A second supplier supplies the additive to the container when the first condition is satisfied and drainage of a part of the mixed solution is finished.
Public/Granted literature
- US20160362793A1 SEMICONDUCTOR MANUFACTURING APPARATUS Public/Granted day:2016-12-15
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