A system for generating an image of a region of interest (ROI) of a target object, the system including a camera, a target stage configured to receive the target object, the target stage configured to provide a translational movement and a rotational movement of the target object, and a controller. The controller is configured to control the camera and target stage to iteratively shift the target along scan trajectories of sample locations to capture images of each of a plurality of concentric rings and sub-rings of a predefined radial pitch over the ROI, the sample locations represented by polar coordinates defining sectors of each of the sub-rings. The controller is further configured to extract super resolution (SR) pixels from the images to reconstruct an SR image of each of the rings in the polar coordinates, and project the SR images into Cartesian coordinate images.