Invention Grant
- Patent Title: Memory cell structures
-
Application No.: US15423965Application Date: 2017-02-03
-
Publication No.: US10734581B2Publication Date: 2020-08-04
- Inventor: Scott E. Sills , D. V. Nirmal Ramaswamy
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
The present disclosure includes memory cell structures and method of forming the same. One such method includes forming a memory cell includes forming, in a first direction, a select device stack including a select device formed between a first electrode and a second electrode; forming, in a second direction, a plurality of sacrificial material lines over the select device stack to form a via; forming a programmable material stack within the via; and removing the plurality of sacrificial material lines and etching through a portion of the select device stack to isolate the select device.
Public/Granted literature
- US20170148987A1 MEMORY CELL STRUCTURES Public/Granted day:2017-05-25
Information query
IPC分类: