Invention Grant
- Patent Title: Monolithically configured spectroscopic instrument
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Application No.: US16425685Application Date: 2019-05-29
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Publication No.: US10732040B2Publication Date: 2020-08-04
- Inventor: Heinrich Grueger , Jens Knobbe , Tino Puegner
- Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Perkins Coie LLP
- Agent Michael A. Glenn
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@d2cef7a
- Main IPC: G01J3/28
- IPC: G01J3/28 ; G01J3/26 ; G01J3/18 ; G01J3/06 ; G01J3/14 ; G01J3/12
Abstract:
A spectroscopic instrument includes a first aperture limiting device, a second aperture limiting device, a first mirror, a movable MEMS mirror, and a dispersive element spatially separate from the MEMS mirror, the movable MEMS mirror being movable in relation to the dispersive element, the movable MEMS mirror being monolithically configured as a common component with at least one of the first aperture limiting device, the second aperture limiting device, and the dispersive element, and the first and second aperture limiting devices being arranged to be spatially separate from the movable MEMS mirror and having a lateral offset from a rotational axis of the movable MEMS mirror.
Public/Granted literature
- US20190368931A1 MONOLITHICALLY CONFIGURED SPECTROSCOPIC INSTRUMENT Public/Granted day:2019-12-05
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