Invention Grant
- Patent Title: Apparatus for automatically and quickly detecting two-dimensional morphology for wafer substrate in real time
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Application No.: US16319322Application Date: 2014-08-19
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Publication No.: US10731973B2Publication Date: 2020-08-04
- Inventor: Jianpeng Liu , Tang Zhang , Chengmin Li
- Applicant: AK OPTICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing
- Assignee: AK OPTICS TECHNOLOGY CO., LTD.
- Current Assignee: AK OPTICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Platinum Intellectual Property LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@70fc3ad
- International Application: PCT/CN2014/084684 WO 20140819
- International Announcement: WO2015/169007 WO 20151112
- Main IPC: G01B11/245
- IPC: G01B11/245 ; G01N21/956 ; G01B11/255 ; H01L21/66 ; G01N21/95 ; H01L33/00 ; H01L33/20

Abstract:
A device for detecting a two-dimensional morphology of a wafer substrate in real time. The device comprises: a first calculation module, a second calculation module and an analysis module, wherein the first calculation module calculates the curvature CX between any two points of incidence on the wafer substrate in an X direction of a substrate to be detected according to position signals of N light spots; the second calculation module calculates the curvature CY at any one point of incidence on the wafer substrate in a moving direction, i.e. a Y direction, of the substrate to be detected according to the position signals of N light spots. The device can be adapted to a sapphire substrate on a graphite disc which rotates at a high speed.
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