- Patent Title: Lithium tantalate single crystal substrate for a surface acoustic wave device and a device using the same, and a manufacturing method thereof and an inspection method thereof
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Application No.: US15543359Application Date: 2015-12-16
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Publication No.: US10707829B2Publication Date: 2020-07-07
- Inventor: Masayuki Tanno , Jun Abe , Yoshinori Kuwabara , Junichi Kushibiki
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4d50d022
- International Application: PCT/JP2015/085165 WO 20151216
- International Announcement: WO2016/114056 WO 20160721
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H01L41/18 ; H03H3/08 ; G01N29/22 ; G01N29/24 ; G01N29/02 ; H03H9/25 ; G01N29/04 ; G01N29/07 ; H03H3/10

Abstract:
A lithium tantalate single crystal substrate for a surface acoustic wave device that is a rotated Y-cut LiTaO3 substrate whose crystal orientation has a Y-cut angle of not smaller than 36° and not larger than 49° and which has such a Li concentration profile after diffusion of Li into the substrate from the surface thereof that the Li concentration at the surface of the substrate differs from that inside the substrate. A shear vertical type elastic wave whose main components are vibrations in the thickness direction and in the propagation direction and which is among those elastic waves which propagate in the X axis direction within the surface of this LiTaO3 substrate has an acoustic velocity of not lower than 3140 m/s and not higher than 3200 m/s.
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