Invention Grant
- Patent Title: Piezoelectric element
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Application No.: US15640747Application Date: 2017-07-03
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Publication No.: US10707404B2Publication Date: 2020-07-07
- Inventor: Yoshiki Ohta , Satoshi Sasaki , Yoshiaki Ohta , Takahiro Kezuka , Katsuya Inaba , Rin Sato , Kazushi Tachimoto , Masayoshi Inoue , Yuzo Komatsu
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@37728abf com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@43a8283c com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@531618ae com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@214e9af5 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@24acb11
- Main IPC: H01L41/083
- IPC: H01L41/083 ; H01L41/047

Abstract:
In a piezoelectric element, internal stress generated in an inactive portion at the time of sintering when a piezoelectric element is fabricated or stress applied from the outside to the inactive portion is absorbed by a recess of a lower surface of a first through hole conductor and a recess of an upper surface of a second through hole conductor. Accordingly, for example, deformation, rupture, or the like of the through hole conductor is prevented, and conduction failure or disconnection of an electrode layer or a through hole conductor is prevented. Further, in the inactive portion, since a protrusion of the piezoelectric layer enters the recess of the through hole conductor, a holding force of the piezoelectric layer with respect to the through hole conductor increases, and deformation of the through hole conductor is prevented or obstructed.
Public/Granted literature
- US20180013056A1 PIEZOELECTRIC ELEMENT Public/Granted day:2018-01-11
Information query
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