- Patent Title: Semiconductor device manufacturing method and semiconductor device
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Application No.: US15745828Application Date: 2016-11-25
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Publication No.: US10707302B2Publication Date: 2020-07-07
- Inventor: Atsushi Ogasawara , Fumihiro Homma
- Applicant: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
- Current Assignee: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Nixon & Vanderhye P.C.
- International Application: PCT/JP2016/084913 WO 20161125
- International Announcement: WO2018/096642 WO 20180531
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/268 ; H01L21/762

Abstract:
A semiconductor device manufacturing method includes: a pretreatment step of performing a hydrophobic treatment on a first exposed region of an exposed surface, an n-type semiconductor layer being exposed from the first exposed region, and a pn junction being exposed from the exposed surface; an impurity supplying step of supplying an n-type impurity to the first exposed region; a channel stopper forming step of irradiating the first exposed region with a laser beam to introduce the n-type impurity into the n-type semiconductor layer, thus forming a channel stopper; and a glass layer forming step of forming a glass layer using a glass composition so as to cover the exposed surface.
Public/Granted literature
- US20200083321A1 SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE Public/Granted day:2020-03-12
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