Invention Grant
- Patent Title: Fabrication of contacts in an RF switch having a phase-change material (PCM) and a heating element
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Application No.: US16114106Application Date: 2018-08-27
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Publication No.: US10707125B2Publication Date: 2020-07-07
- Inventor: Jefferson E. Rose , Gregory P. Slovin , David J. Howard , Michael J. DeBar , Nabil El-Hinnawy
- Applicant: Newport Fab, LLC
- Applicant Address: US CA Newport Beach
- Assignee: Newport Fab, LLC
- Current Assignee: Newport Fab, LLC
- Current Assignee Address: US CA Newport Beach
- Agency: Farjami & Farjami LLP
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/768 ; H01L45/00 ; H01L23/66 ; H01L23/525

Abstract:
In fabricating a radio frequency (RF) switch, a phase-change material (PCM) and a heating element, underlying an active segment of the PCM and extending outward and transverse to the PCM, are provided. Lower portions of PCM contacts for connection to passive segments of the PCM are formed, wherein the passive segments extend outward and are transverse to the heating element. Upper portions of the PCM contacts are formed from a lower interconnect metal. Heating element contacts are formed cross-wise to the PCM contacts. The heating element contacts can comprise a top interconnect metal directly connecting with terminal segments of the heating element. The heating element contacts can comprise a top interconnect metal and intermediate metal segments for connecting with the terminal segments of the heating element.
Public/Granted literature
- US20200058854A1 Fabrication of Contacts in an RF Switch Having a Phase-Change Material (PCM) and a Heating Element Public/Granted day:2020-02-20
Information query
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