Invention Grant
- Patent Title: Method and device for plasma treatment of substrates
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Application No.: US15306132Application Date: 2014-05-09
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Publication No.: US10707059B2Publication Date: 2020-07-07
- Inventor: Thomas Glinsner , Christoph Flotgen , Johann Bernauer , Thomas Wagenleitner , Thomas Wieser , Florian Schmid , Thomas Plach , Roman Anzengruber , Alexander Nones , Uwe Kriebisch
- Applicant: EV Group E. Thallner GmbH
- Applicant Address: AT St. Florian am Inn
- Assignee: EV Group E. Thallner GmbH
- Current Assignee: EV Group E. Thallner GmbH
- Current Assignee Address: AT St. Florian am Inn
- Agency: Kusner & Jaffe
- International Application: PCT/EP2014/059524 WO 20140509
- International Announcement: WO2015/169385 WO 20151112
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01J37/32 ; H01L21/687 ; H01L21/3065 ; H01L21/67
Abstract:
A device for bombarding at least one substrate with a plasma with a first electrode and a second electrode that can be arranged opposite thereto, which electrodes are formed together producing the plasma between the electrodes wherein at least one of the electrodes is formed from at least two electrode units. In addition, this invention relates to a corresponding method.
Public/Granted literature
- US20170047203A1 METHOD AND DEVICE FOR PLASMA TREATMENT OF SUBSTRATES Public/Granted day:2017-02-16
Information query
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