Invention Grant
- Patent Title: System and method to detect glitches
-
Application No.: US16046159Application Date: 2018-07-26
-
Publication No.: US10707050B2Publication Date: 2020-07-07
- Inventor: Keith E. Kowal
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Agency: Nields, Lemack & Frame, LLC
- Main IPC: H01J37/24
- IPC: H01J37/24 ; H03K19/00 ; H03M1/12 ; H01J37/317 ; H01L21/265

Abstract:
A glitch monitoring system is disclosed. The glitch monitoring system allows the capture of voltage and current data from one or more channels. Additionally, voltage and current data that occurred prior to the glitch can also be captured for further analysis. The amount of data may be thousands or millions of bytes. Additionally, the description of a glitch, including an upper threshold, a lower threshold and a duration, can be programmed. This allows spurious perturbation in voltage or current to be ignored if desired. Further, the voltage and current data may be filtered if desired prior to being stored in memory. This data can later be retried by a main controller and analyzed to determine a potential cause of the glitch and potential remedial actions.
Public/Granted literature
- US20200035446A1 System And Method To Detect Glitches Public/Granted day:2020-01-30
Information query