Invention Grant
- Patent Title: Imprint method
-
Application No.: US15714080Application Date: 2017-09-25
-
Publication No.: US10705422B2Publication Date: 2020-07-07
- Inventor: Yoshihiro Shiode
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@27673ce8
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F9/00 ; B29C59/02 ; B82Y10/00 ; B82Y40/00 ; G11B5/855 ; B29K101/00

Abstract:
The present invention provides an imprint apparatus comprising a deforming unit configured to deform a pattern surface by applying a force to a mold, a measuring unit configured to measure a deformation amount of the pattern surface, a control unit configured to control the measuring unit to measure the deformation amount in each of a plurality of states in which a plurality of the forces are applied to the mold, a calculation unit configured to calculate a rate of change in the deformation amount as a function of a change in the force applied to the mold, and a calibration unit configured to calibrate a control profile describing a time in the imprint process, and the force applied to the mold, based on the rate of change in the deformation amount.
Public/Granted literature
- US20180011400A1 IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2018-01-11
Information query