Invention Grant
- Patent Title: Metrological scanning probe microscope
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Application No.: US16460470Application Date: 2019-07-02
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Publication No.: US10705114B2Publication Date: 2020-07-07
- Inventor: Aleksander Labuda , Deron Walters , Jason Cleveland , Roger Proksch
- Applicant: Oxford Instruments Asylum Research, Inc.
- Assignee: Oxford Instruments Asylum Research Inc
- Current Assignee: Oxford Instruments Asylum Research Inc
- Agency: Law Office of Scott C Harris, Inc
- Main IPC: G01Q20/02
- IPC: G01Q20/02
Abstract:
This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
Public/Granted literature
- US20190324054A1 Metrological Scanning Probe Microscope Public/Granted day:2019-10-24
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