Invention Grant
- Patent Title: Thermal-piezoresistive oscillator-based aerosol sensor and aerosol sensing method
-
Application No.: US15970859Application Date: 2018-05-03
-
Publication No.: US10705053B2Publication Date: 2020-07-07
- Inventor: Sheng-Shian Li , Ting-Yuan Liu
- Applicant: NATIONAL TSING HUA UNIVERSITY
- Applicant Address: TW Hsinchu
- Assignee: NATIONAL TSING HUA UNIVERSITY
- Current Assignee: NATIONAL TSING HUA UNIVERSITY
- Current Assignee Address: TW Hsinchu
- Agency: CKC & Partners Co., LLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@674f6987
- Main IPC: G01N5/02
- IPC: G01N5/02 ; G01N15/06 ; G01N29/036 ; H03B5/30 ; G01N29/24 ; H03H9/24 ; H03H9/02

Abstract:
The present disclosure provides an aerosol sensing method. The aerosol sensing method includes steps of providing an entering process, providing a particle collecting process and providing a measuring process. The entering process is to allow an aerosol to enter a chamber of a thermal-piezoresistive oscillator-based aerosol sensor, and a thermal-piezoresistive resonator is disposed in the chamber. The particle collecting process is to allow particulate matters in the aerosol to land on at least one proof-mass of the thermal-piezoresistive resonator when the thermal-piezoresistive resonator is not driven. The measuring process is to use an electrical signal to drive the thermal-piezoresistive resonator and measure a resonant frequency of the thermal-piezoresistive resonator. The particle collecting process and the measuring process are operated in a repetitive cycle for measuring changes of the resonant frequency of the thermal-piezoresistive resonator to measure the particulate matters of the aerosol.
Public/Granted literature
- US20190227034A1 THERMAL-PIEZORESISTIVE OSCILLATOR-BASED AEROSOL SENSOR AND AEROSOL SENSING METHOD Public/Granted day:2019-07-25
Information query