Invention Grant
- Patent Title: Stator-side member and vacuum pump
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Application No.: US14422173Application Date: 2013-08-26
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Publication No.: US10704555B2Publication Date: 2020-07-07
- Inventor: Yoshiyuki Sakaguchi , Akihiro Ito , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
- Applicant: Edwards Japan Limited
- Applicant Address: JP Yachiyo-shi
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Yachiyo-shi
- Agency: Shumaker & Sieffert, P.A.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7250a900
- International Application: PCT/JP2013/072666 WO 20130826
- International Announcement: WO2014/038416 WO 20140313
- Main IPC: F04D19/04
- IPC: F04D19/04 ; F04D29/02 ; F04D29/54 ; F04D29/58 ; F04D29/38

Abstract:
The invention provides a stator-side member which is arranged in a vacuum pump and which, without the provision of a heat insulation material, prevents the deposition of products at the lower side of a threaded groove pump unit, with this lower side being an area of high pressure where the deposition of products (deposits) occurs easily, and also provides a vacuum pump equipped with this stator-side member. A threaded groove spacer configured to have a coefficient of thermal conductivity lower than a predetermined value is arranged in a vacuum pump equipped with a threaded groove pump unit. (1) The threaded groove spacer is manufactured from a material having a coefficient of thermal conductivity lower than that of a member which opposes or comes into contact with the threaded groove spacer. Specifically, this material has a coefficient of thermal conductivity lower than that of aluminum or aluminum alloy, and is preferably any one of stainless steel, fiber-reinforced plastic, polyetherimide, and polyetheretherketone. (2) The threaded groove spacer is constituted by at least two or more parts.
Public/Granted literature
- US20150240822A1 STATOR-SIDE MEMBER AND VACUUM PUMP Public/Granted day:2015-08-27
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