Invention Grant
- Patent Title: Electrochemical plating
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Application No.: US15376060Application Date: 2016-12-12
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Publication No.: US10704158B2Publication Date: 2020-07-07
- Inventor: Chen-Kuang Lien , Lun-Chieh Chiu , Yu-Min Chang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: C25D21/12
- IPC: C25D21/12 ; H01L21/288 ; H01L21/768 ; C25D7/12 ; H01L23/522 ; H01L23/532 ; C25D17/00

Abstract:
Methods for use in electrochemical plating processes are described herein. An exemplary method includes determining a wafer electrical property associated with a wafer, wherein the wafer electrical property affects the wafer during an electrochemical plating (ECP) process; adjusting a process parameter to be applied to the wafer during the ECP process based on the determined wafer electrical property, wherein the process parameter specifies at least one of a current or a voltage; and applying the adjusted process parameter to the wafer undergoing the ECP process. In some implementations, the process parameter is adjusted, such that a peak entry current of the ECP process substantially matches a plating current of the ECP process induced following the peak entry current.
Public/Granted literature
- US20170088970A1 Electrochemical Plating Public/Granted day:2017-03-30
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