Invention Grant
- Patent Title: Polishing apparatus
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Application No.: US14476680Application Date: 2014-09-03
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Publication No.: US10702972B2Publication Date: 2020-07-07
- Inventor: Makoto Fukushima , Hozumi Yasuda , Keisuke Namiki , Osamu Nabeya , Shingo Togashi , Satoru Yamaki
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@470c49f0 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@55cfd4de
- Main IPC: B24B37/32
- IPC: B24B37/32 ; B24B49/16 ; H01L21/304 ; B24B37/005

Abstract:
A polishing apparatus capable of precisely controlling a polishing profile, particularly a polishing profile in an edge portion, of a wafer is disclosed. The polishing apparatus includes: a top ring shaft; a housing fixed to the top ring shaft; a flexible membrane configured to press a wafer against a polishing pad; a top ring body configured to hold the flexible membrane; a retaining ring coupled to the top ring body and disposed so as to surround the flexible membrane; a gimbal mechanism configured to allow the top ring body and the retaining ring to tilt with respect to the housing; and a local load exerting mechanism configured to exert a downward local load on a part of the retaining ring.
Public/Granted literature
- US20140370794A1 POLISHING APPARATUS Public/Granted day:2014-12-18
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