Invention Grant
- Patent Title: Acoustic wave resonator and method for manufacturing the same
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Application No.: US15789629Application Date: 2017-10-20
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Publication No.: US10693438B2Publication Date: 2020-06-23
- Inventor: Yeong Gyu Lee , Sung Won Im , Dong Woon Chang , Hyung Goo Baek
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@15e5f64a
- Main IPC: H03H9/05
- IPC: H03H9/05 ; H03H9/02 ; H03H9/54 ; H03H9/10 ; H03H9/17 ; H03H3/04 ; H01L23/00 ; H01L41/047 ; H01L41/29 ; H03H3/02

Abstract:
An acoustic wave resonator includes: a substrate; a resonating portion formed on a first surface of the substrate; a metal pad connected to the resonating portion through a via hole formed in the substrate; and a protective layer disposed on a second surface of the substrate and including a plurality of layers, wherein the plurality of layers includes an internal protective layer directly in contact with the second surface of the substrate and formed of an insulating material including an adhesion that is stronger than an adhesion of other layers, among the plurality of layers.
Public/Granted literature
- US20180191328A1 ACOUSTIC WAVE RESONATOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2018-07-05
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