Invention Grant
- Patent Title: Implant regrowth VCSEL and VCSEL array with heterogeneous combination of different VCSEL types
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Application No.: US16533734Application Date: 2019-08-06
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Publication No.: US10693277B2Publication Date: 2020-06-23
- Inventor: Luke A. Graham , Sonia Quadery , Deepa Gazula , Haiquan Yang
- Applicant: Finisar Corporation
- Applicant Address: US DE Wilmington
- Assignee: II-VI Delaware Inc.
- Current Assignee: II-VI Delaware Inc.
- Current Assignee Address: US DE Wilmington
- Agency: Maschoff Brennan
- Main IPC: H01S5/183
- IPC: H01S5/183 ; H01S5/42 ; H01S5/20

Abstract:
A non-planarized VCSEL can include: a blocking region over or under an active region, the blocking region having a first thickness; one or more conductive channel cores in the blocking region, the one or more conductive channel cores having a second thickness that is larger than the first thickness, wherein the blocking region is defined by having an implant and the one or more conductive channel cores are devoid of the implant, wherein the blocking region is lateral the one or more conductive channel cores, the blocking region and one or more conductive channel cores being an isolation region; and a non-planarized semiconductor region of one or more non-planarized semiconductor layers over the isolation region. The VCSEL can include a planarized bottom mirror region below the active region and a non-planarized top mirror region above the isolation region, or a non-planarized bottom mirror region below the active region.
Public/Granted literature
- US20190393678A1 IMPLANT REGROWTH VCSEL AND VCSEL ARRAY WITH HETEROGENEOUS COMBINATION OF DIFFERENT VCSEL TYPES Public/Granted day:2019-12-26
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