Invention Grant
- Patent Title: Method of manufacturing a semiconductor device including non-volatile memory cells
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Application No.: US16201358Application Date: 2018-11-27
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Publication No.: US10693018B2Publication Date: 2020-06-23
- Inventor: Cheng-Bo Shu , Yun-Chi Wu , Chung-Jen Huang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/1157 ; H01L29/06 ; H01L29/423 ; H01L29/786 ; H01L29/66 ; H01L21/28 ; H01L27/12 ; H01L29/78

Abstract:
A semiconductor device includes a non-volatile memory (NVM) cell. The NVM cell includes a semiconductor wire disposed over an insulating layer disposed on a substrate. The NVM cell includes a select transistor and a control transistor. The select transistor includes a gate dielectric layer disposed around the semiconductor wire and a select gate electrode disposed on the gate dielectric layer. The control transistor includes a stacked dielectric layer disposed around the semiconductor wire and a control gate electrode disposed on the stacked dielectric layer. The stacked dielectric layer includes a charge trapping layer. The select gate electrode is disposed adjacent to the control gate electrode with the stacked dielectric layer interposed therebetween.
Public/Granted literature
- US20190140108A1 METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR DEVICE Public/Granted day:2019-05-09
Information query
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