Invention Grant
- Patent Title: Gate cut in RMG
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Application No.: US16599229Application Date: 2019-10-11
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Publication No.: US10692990B2Publication Date: 2020-06-23
- Inventor: Ruqiang Bao , Siva Kanakasabapathy , Andrew M. Greene
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L21/308 ; H01L21/306 ; H01L21/768 ; H01L21/8234 ; H01L27/088 ; H01L29/78 ; H01L21/027 ; H01L21/8238 ; H01L29/66

Abstract:
A method is presented for performing a gate cut in a field effect transistor (FET) structure. The method includes forming a plurality of fins and at least one insulating pillar over a semiconductor substrate, depositing a first work function metal layer, removing the first work function metal layer from a first set of fins, depositing a second work function metal layer, depositing a conductive material over the second work function metal layer, forming at least one gate trench through the conductive material and adjacent the first set of fins to separate active gate regions, and filling the at least one gate trench with an insulating material.
Public/Granted literature
- US20200044052A1 GATE CUT IN RMG Public/Granted day:2020-02-06
Information query
IPC分类: