Invention Grant
- Patent Title: Semiconductor memory device having vertical semiconductor films with narrowing widths and gate insulating films with different thickness
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Application No.: US16291497Application Date: 2019-03-04
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Publication No.: US10692886B2Publication Date: 2020-06-23
- Inventor: Shunsuke Kasashima , Jun Nishimura , Takamitsu Ochi , Hisashi Harada , Ayaha Hachisuga , Ayako Kawanishi
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@fade1b3
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11568 ; H01L27/1157 ; H01L27/11573 ; H01L27/11565 ; H01L29/10 ; H01L21/02 ; H01L21/3065 ; H01L21/311 ; H01L21/3213 ; H01L21/28

Abstract:
A semiconductor memory device according to an embodiment includes: a substrate; a plurality of first gate electrodes; a first semiconductor film facing the plurality of first gate electrodes; and a first gate insulating film provided between the plurality of first gate electrodes and the first semiconductor film. Moreover, this semiconductor memory device includes: a plurality of second gate electrodes; a second semiconductor film facing the plurality of second gate electrodes; and a second gate insulating film provided between the plurality of second gate electrodes and the second semiconductor film. Moreover, this semiconductor memory device includes: a third gate electrode that is provided between the plurality of first gate electrodes and the plurality of second gate electrodes, and extends in a second direction; and a third gate insulating film provided between the third gate electrode and the first semiconductor film. Moreover, a thickness in a first direction of the third gate insulating film is larger than a width in the second direction of the first gate insulating film and the second gate insulating film.
Public/Granted literature
- US20200075624A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-03-05
Information query
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