Invention Grant
- Patent Title: Semiconductor device and method for manufacturing semiconductor device
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Application No.: US16347744Application Date: 2017-11-08
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Publication No.: US10692869B2Publication Date: 2020-06-23
- Inventor: Yasuhiko Takemura , Yoshiyuki Kurokawa
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office
- Agent Eric J. Robinson
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@35dee064
- International Application: PCT/IB2017/056970 WO 20171108
- International Announcement: WO2018/092003 WO 20180524
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L27/105 ; H01L27/12 ; H01L49/02 ; H01L29/66 ; H01L29/786 ; G11C11/409 ; G11C11/405 ; H01L29/423 ; G11C11/4094 ; G11C11/56 ; G11C11/401 ; H01L29/49 ; H01L29/78

Abstract:
A semiconductor device with a large storage capacity per unit area is provided. The disclosed semiconductor device includes a plurality of gain-cell memory cells each stacked over a substrate. Axes of channel length directions of write transistors of memory cells correspond to each other, and are substantially perpendicular to the top surface of the substrate. The semiconductor device can retain multi-level data. The channel of read transistors is columnar silicon (embedded in a hole penetrating gates of the read transistors). The channel of write transistors is columnar metal oxide (embedded in a hole penetrating the gates of the read transistors and gates, or write word lines, of the write transistors). The columnar silicon faces the gate of the read transistor with an insulating film therebetween. The columnar metal oxide faces the write word line with an insulating film, which is obtained by oxidizing the write word line, therebetween, and is electrically connected to the gate of the read transistor.
Public/Granted literature
- US20190259761A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2019-08-22
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