Invention Grant
- Patent Title: Method and device for alignment of substrates
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Application No.: US16323539Application Date: 2016-08-29
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Publication No.: US10692747B2Publication Date: 2020-06-23
- Inventor: Thomas Wagenleitner , Dominik Zinner , Jurgen Markus Suss , Christian Sinn , Jurgen Mallinger
- Applicant: EV Group E. Thallner GmbH
- Applicant Address: AT St. Florian am Inn
- Assignee: EV Group E. Thallner GmbH
- Current Assignee: EV Group E. Thallner GmbH
- Current Assignee Address: AT St. Florian am Inn
- Agency: Kusner & Jaffe
- International Application: PCT/EP2016/070289 WO 20160829
- International Announcement: WO2018/041326 WO 20180308
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/68 ; H01L21/67 ; H01L23/544 ; H01L21/683
Abstract:
A method for aligning and contacting a first substrate with a second substrate using a plurality of detection units, and a corresponding device for alignment and contact.
Public/Granted literature
- US20190198371A1 METHOD AND DEVICE FOR ALIGNMENT OF SUBSTRATES Public/Granted day:2019-06-27
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