Invention Grant
- Patent Title: Semiconductor device, and method for manufacturing the same
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Application No.: US16379038Application Date: 2019-04-09
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Publication No.: US10686067B2Publication Date: 2020-06-16
- Inventor: Yuki Nakano
- Applicant: Rohm Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4018dd13 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@46aa603d
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L29/10 ; H01L29/66 ; H01L29/36 ; H01L29/423 ; H01L21/04 ; H01L29/16 ; H01L29/417

Abstract:
A semiconductor device (A1) includes a semiconductor layer having a first face with a trench (3) formed thereon and a second face opposite to the first face, a gate electrode (41), and a gate insulating layer (5). The semiconductor layer includes a first n-type semiconductor layer (11), a second n-type semiconductor layer (12), a p-type semiconductor layer (13), and an n-type semiconductor region (14). The trench (3) is formed so as to penetrate through the p-type semiconductor layer (13) and to reach the second n-type semiconductor layer (12). The p-type semiconductor layer (13) includes an extended portion extending to a position closer to the second face of the semiconductor layer than the trench (3) is. Such structure allows suppressing dielectric breakdown in the gate insulating layer (5).
Public/Granted literature
- US20190237578A1 SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2019-08-01
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