- Patent Title: Semiconductor memory devices and methods for fabricating the same
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Application No.: US15514239Application Date: 2014-09-26
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Publication No.: US10685972B2Publication Date: 2020-06-16
- Inventor: Sunggil Kim , Phil Ouk Nam , Gukhyon Yon , Sunghae Lee , Woojin Jang , Dongchul Yoo , Hunhyeong Lim , Junggeun Jee , Kihyun Hwang
- Applicant: Sunggil Kim , Phil Ouk Nam , Gukhyon Yon , Sunghae Lee , Woojin Jang , Dongchul Yoo , Hunhyeong Lim , Junggeun Jee , Kihyun Hwang
- Applicant Address: KR Suwon-Si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si, Gyeonggi-do
- Agency: Lee IP Law, PC
- International Application: PCT/IB2014/064848 WO 20140926
- International Announcement: WO2016/046602 WO 20160331
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11568 ; H01L21/28 ; H01L27/115 ; H01L49/02 ; H01L21/02 ; H01L21/311 ; H01L27/1157 ; H01L29/10

Abstract:
The inventive concepts provide semiconductor memory devices and methods for fabricating the same. The semiconductor memory device may include a plurality of gates vertically stacked on a substrate, a vertical channel filling a channel hole vertically penetrating the plurality of gates, and a memory layer vertically extending on an inner sidewall of the channel. The vertical channel may include a lower channel filling a lower region of the channel hole and electrically connected to the substrate, and an upper channel filling an upper region of the channel hole and contacting the lower channel. The upper channel may extend along the memory layer and the lower channel in the upper region of the channel hole and may have a uniform thickness.
Public/Granted literature
- US20170287929A1 SEMICONDUCTOR MEMORY DEVICES AND METHODS FOR FABRICATING THE SAME Public/Granted day:2017-10-05
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