Invention Grant
- Patent Title: Method for implementing and regulating patterning of a graphene film by ultraviolet photo-oxidation
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Application No.: US16317555Application Date: 2016-10-18
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Publication No.: US10685839B2Publication Date: 2020-06-16
- Inventor: Haihua Tao , Xianfeng Chen , Yixuan Wu , Shubin Su , Huan Yue , Hao Li
- Applicant: SHANGHAI JIAO TONG UNIVERSITY
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI JIAO TONG UNIVERSITY
- Current Assignee: SHANGHAI JIAO TONG UNIVERSITY
- Current Assignee Address: CN Shanghai
- Agency: Dragon Sun Law Firm, PC
- Agent Jinggao Li, Esq.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4b3203dc
- International Application: PCT/CN2016/102338 WO 20161018
- International Announcement: WO2018/010330 WO 20180118
- Main IPC: H01L21/04
- IPC: H01L21/04 ; H01L21/308 ; H01L21/3065 ; H01L21/02 ; H01L29/16

Abstract:
There is provided a method for implementing and regulating patterning of a graphene film by ultraviolet photo-oxidation, including: implementing patterning of a graphene film micron structure pattern by using a xenon lamp excimer ultraviolet photo-oxidation vacuum apparatus and a hard mask; 2: controlling oxygen excitons, by applying a non-uniform magnetic field on the surface of the graphene film in a vertical direction, to move toward the graphene film in a direction of a magnetic field, so as to enhance the directivity of etching to the graphene film in the vertical direction, thereby improving patterning quality of the graphene film with micron-structure; and (3) by adjusting the intensity and direction of the magnetic field moving direction of the oxygen excitons is controlled, and the shape of the etched pattern structure of the graphene film is controlled, and thus controlling the patterning of the graphene film may be achieved.
Public/Granted literature
- US20190287803A1 METHOD FOR IMPLEMENTING AND REGULATING PATTERNING OF A GRAPHENE FILM BY ULTRAVIOLET PHOTO-OXIDATION Public/Granted day:2019-09-19
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