Invention Grant
- Patent Title: Plasma treatment device with two microwave plasma sources coupled to one another, and method for operating a plasma treatment device of this kind
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Application No.: US16341455Application Date: 2017-10-10
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Publication No.: US10685813B2Publication Date: 2020-06-16
- Inventor: Joachim Mai
- Applicant: Meyer Burger (Germany) GmbH
- Applicant Address: DE Hohenstein-Ernstthal
- Assignee: Meyer Burger (Germany) GmbH
- Current Assignee: Meyer Burger (Germany) GmbH
- Current Assignee Address: DE Hohenstein-Ernstthal
- Agent Michael Soderman
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7e65b2a4
- International Application: PCT/EP2017/075777 WO 20171010
- International Announcement: WO2018/069299 WO 20180419
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/46

Abstract:
The invention relates to a plasma treatment device with a treatment chamber, at least one pair of microwave plasma sources and at least one voltage source. Each pair of microwave plasma sources consists of a first microwave plasma source and a second microwave plasma source, wherein the first and the second microwave plasma source each have a plasma source wall and, within this, a microwave coupling-in device and a plasma electrode. The first and the second microwave plasma source are arranged within the treatment chamber on the same side of one or more substrates to be processed and adjacently to one another. The plasma electrodes of the first microwave plasma source and the second microwave plasma source are electrically insulated from one another and electrically conductively connected to the at least one voltage source. Here, the at least one voltage source is suitable for supplying the plasma electrodes of the first and the second microwave plasma source with different potentials. The invention also relates to a method for operating a plasma treatment device of this kind.
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