Invention Grant
- Patent Title: Switchable matching network and an inductively coupled plasma processing apparatus having such network
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Application No.: US16387438Application Date: 2019-04-17
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Publication No.: US10685811B2Publication Date: 2020-06-16
- Inventor: Kui Zhao , Hiroshi Iizuka , Tuqiang Ni , Xiaobei Pang
- Applicant: Advanced Micro-Fabrication Equipment Inc. China
- Applicant Address: CN Shanghai
- Assignee: ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Current Assignee: ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Current Assignee Address: CN Shanghai
- Agency: Womble Bond Dickinson (US) LLP
- Agent Joseph Bach, Esq.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6ba173ac
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H03H7/40

Abstract:
A switchable matching network and an inductively coupled plasma processing apparatus having such network are disclosed. The switchable matching network enables selection between two bias power frequencies. The network is particularly suitable for an inductively-coupled plasma processing apparatus. The switchable matching network comprises: a first match circuit having a first input port connected to a first signal source and a first output port coupled to a load; a second match circuit having a second input port connected to a second signal source and a second output port coupled to the load; a switching device having a first connection port, a second connection port and a third connection port, the first connection port connected to the first input port and the second connection port connected to the second output port; a variable capacitor connected between ground and the third connection port of the switching device.
Public/Granted literature
- US20200090908A1 SWITCHABLE MATCHING NETWORK AND AN INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS HAVING SUCH NETWORK Public/Granted day:2020-03-19
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