Invention Grant
- Patent Title: Vacuum valve, vacuum pump, and vacuum pumping system
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Application No.: US15863886Application Date: 2018-01-06
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Publication No.: US10683867B2Publication Date: 2020-06-16
- Inventor: Masaya Nakamura , Junichiro Kozaki , Atsuo Nakatani , Nobuyuki Hirata
- Applicant: SHIMADZU CORPORATION
- Applicant Address: JP Kyoto
- Assignee: Shimadzu Corporation
- Current Assignee: Shimadzu Corporation
- Current Assignee Address: JP Kyoto
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@12cf87e1
- Main IPC: F04D27/00
- IPC: F04D27/00 ; H01L21/67 ; F16K51/02 ; F16K31/04 ; F16K3/06 ; F04D19/04 ; F04D25/06 ; F16K3/04 ; F04D29/40
Abstract:
A vacuum valve connected to a vacuum pump, comprises: a valve plate to be openably/closably driven; a drive section configured to openably/closably drive the valve plate; a signal input section to which a pump information signal indicating an operation state of the vacuum pump is input; and a valve control section configured to control operation of the valve plate based on the input pump information signal.
Public/Granted literature
- US20180195518A1 VACUUM VALVE, VACUUM PUMP, AND VACUUM PUMPING SYSTEM Public/Granted day:2018-07-12
Information query
