Invention Grant
- Patent Title: Resonator and resonance device
-
Application No.: US16174563Application Date: 2018-10-30
-
Publication No.: US10673402B2Publication Date: 2020-06-02
- Inventor: Yoshihisa Inoue , Toshio Nishimura , Keisuke Takeyama , Ryota Kawai , Yuichi Goto
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Agency: Arent Fox LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@a397db
- Main IPC: H03H9/21
- IPC: H03H9/21 ; H03H9/02 ; B81B3/00 ; H03H9/10 ; H03H9/24 ; H03H9/05 ; H03H9/13 ; H03H9/17 ; H03H9/15

Abstract:
A resonator that includes a base and one or more vibration arms with fixed ends connected to a front end of the base and open ends extending therefrom. Moreover, the vibration arms include first and second electrodes and a piezoelectric film that is disposed therebetween. The resonator further includes a protective film disposed opposing an upper face of the piezoelectric film and sandwiching the first electrode and a temperature characteristics adjusting film formed of a material different from a material of the protective film and that is provided on the fixed end side relative to the center of the vibration arms such that part of the protective film is exposed to a surface.
Public/Granted literature
- US20190074812A1 RESONATOR AND RESONANCE DEVICE Public/Granted day:2019-03-07
Information query
IPC分类: