Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16293809Application Date: 2019-03-06
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Publication No.: US10672784B2Publication Date: 2020-06-02
- Inventor: Shunsuke Kasashima
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@467178a7
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L21/44 ; H01L27/1157 ; H01L27/11582 ; H01L27/11573

Abstract:
A semiconductor memory device according to an embodiment includes: a substrate; a plurality of first gate electrodes; a first semiconductor film facing the plurality of first gate electrodes; a first gate insulating film provided between the plurality of first gate electrodes and the first semiconductor film; a plurality of second gate electrodes that are further from the substrate than the plurality of first gate electrodes; a second semiconductor film facing the plurality of second gate electrodes; a second gate insulating film provided between the plurality of second gate electrodes and the second semiconductor film; a third gate electrode provided between the plurality of first gate electrodes and the plurality of second gate electrodes; a third semiconductor film facing the third gate electrode; and a third gate insulating film provided between the third gate electrode and the third semiconductor film, a width in a second direction of the third semiconductor film being larger than that of a one end of the second semiconductor film, and smaller than that of the other end of the first semiconductor film.
Public/Granted literature
- US20200075607A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-03-05
Information query
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