Invention Grant
- Patent Title: Integrated circuit and method for manufacturing the same
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Application No.: US15935277Application Date: 2018-03-26
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Publication No.: US10672783B2Publication Date: 2020-06-02
- Inventor: Yun-Chi Wu , Cheng-Bo Shu , Chien Hung Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/1157 ; H01L29/66 ; H01L27/11573 ; H01L29/08 ; H01L29/49 ; H01L21/28 ; H01L29/423 ; H01L29/51

Abstract:
Various embodiments of the present application are directed to an integrated circuit (IC) comprising a memory cell with a large operation window and a high erase speed. In some embodiments, the IC comprises a semiconductor substrate and a memory cell. The memory cell comprises a control gate electrode, a select gate electrode, a charge trapping layer, and a common source/drain region. The common source/drain is defined by the semiconductor substrate and is n-type. The control gate electrode and the select gate electrode overlie the semiconductor substrate and are respectively on opposite sides of the common source/drain. Further, the control gate electrode overlies the charge trapping layer and comprises a metal with a p-type work function. In some embodiments, the select gate electrode comprises a metal with an n-type work function.
Public/Granted literature
- US20190067302A1 HIGH-K METAL GATE (HKMG) PROCESS FOR FORMING A MEMORY CELL WITH A LARGE OPERATION WINDOW Public/Granted day:2019-02-28
Information query
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