Invention Grant
- Patent Title: Extreme ultraviolet light generation method
-
Application No.: US16239746Application Date: 2019-01-04
-
Publication No.: US10667375B2Publication Date: 2020-05-26
- Inventor: Tatsuya Yanagida
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5ca10454
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
An extreme ultraviolet light generation method according to one aspect of the present disclosure includes outputting a droplet to a first laser light irradiation region that is a region different from a plasma generation region, irradiating the droplet that reaches the first laser light irradiation region with first laser light to generate a deformed liquid target, irradiating the deformed liquid target that reaches a second laser light irradiation region that is a region different from the plasma generation region with second laser light to generate a fragment jet target, and irradiating at least a part of the fragment jet target that reaches the plasma generation region with third laser light that propagates in a direction intersecting a propagation direction of the second laser light.
Public/Granted literature
- US20190159327A1 EXTREME ULTRAVIOLET LIGHT GENERATION METHOD Public/Granted day:2019-05-23
Information query