Invention Grant
- Patent Title: Surface acoustic wave resonator having ring-shaped metal sealing configuration
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Application No.: US15803709Application Date: 2017-11-03
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Publication No.: US10665566B2Publication Date: 2020-05-26
- Inventor: Takuma Kuroyanagi
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6a94508d
- Main IPC: H03H9/05
- IPC: H03H9/05 ; H01L21/52 ; H01L23/488 ; H01L23/538 ; H03H3/08 ; H01L23/00 ; H01L23/10 ; H03H3/02 ; H03H9/10

Abstract:
An electronic component includes: a substrate; a device chip including a functional element located on a lower surface thereof and mounted on an upper surface of the substrate so that the functional element faces the upper surface of the substrate across an air gap; a ring-shaped metal layer located on the upper surface of the substrate and surrounding the device chip in plan view, a side surface of the ring-shaped metal layer being located further in than a side surface of the substrate; a metal sealing portion surrounding the device chip in plan view and bonding with an upper surface of the ring-shaped metal layer, a side surface of the metal sealing portion being located further out than the side surface of the ring-shaped metal layer; and a metal film located on the side surface of the metal sealing portion and the side surface of the ring-shaped metal layer.
Public/Granted literature
- US20180151534A1 ELECTRONIC COMPONENT AND METHOD OF FABRICATING THE SAME Public/Granted day:2018-05-31
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