Invention Grant
- Patent Title: Substrate carrier having drip edge configurations
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Application No.: US14740214Application Date: 2015-06-15
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Publication No.: US10665486B2Publication Date: 2020-05-26
- Inventor: Lutz Rebstock
- Applicant: BROOKS CCS GmbH
- Applicant Address: DE Gaienhofen
- Assignee: BROOKS CCS, GmbH
- Current Assignee: BROOKS CCS, GmbH
- Current Assignee Address: DE Gaienhofen
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: B25B11/00
- IPC: B25B11/00 ; H01L21/673 ; A47J47/20 ; H01L21/67 ; H01L21/02 ; H01L21/306

Abstract:
Substrate carrier can have drainage area leading the liquid away from the substrates, so that liquid droplet can be channeled away from the substrate area. The drainage area can include tilted lines and surfaces toward the ground away from the substrates. The carrier can further have drainage area leading the liquid to an end of the carrier, which then can be channeled to the ground without being free fall to the ground.
Public/Granted literature
- US20150279710A1 Substrate carrier having drip edge configurations Public/Granted day:2015-10-01
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