Invention Grant
- Patent Title: Analyzing energy of charged particles
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Application No.: US15183061Application Date: 2016-06-15
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Publication No.: US10665423B2Publication Date: 2020-05-26
- Inventor: Dirk Preikszas
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Muirhead and Saturelli, LLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2ef194dd
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/28 ; H01J37/10 ; H01J37/147 ; H01J37/21

Abstract:
An analysis device, possibly having an electrostatic and/or magnetic lens, analyzes the energy of charged particles and has an opposing field grid device to which a voltage is applied in such a way that a portion of the charged particles is reflected by the opposing field grid device. Another portion of the charged particles passes through the opposing field grid device and is detected by a detector. The opposing field grid device has a curvature. A center of curvature is an intersection point of an optical axis with the opposing field grid device. The curvature has a radius of curvature which is given by the section between the center of curvature and a starting point on the optical axis. The opposing field grid device is curved in the direction of the starting point as viewed from the center of curvature and/or is arranged to be displaceable along the optical axis.
Public/Granted literature
- US20160365221A1 ANALYZING ENERGY OF CHARGED PARTICLES Public/Granted day:2016-12-15
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