Invention Grant
- Patent Title: Imprint system and imprinting process with spatially non-uniform illumination
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Application No.: US15837898Application Date: 2017-12-11
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Publication No.: US10663869B2Publication Date: 2020-05-26
- Inventor: Niyaz Khusnatdinov , Edward Brian Fletcher , Craig William Cone , Douglas J. Resnick , Zhengmao Ye
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agent Daniel Ratoff
- Main IPC: G03B27/04
- IPC: G03B27/04 ; G03F7/20 ; G03F7/00

Abstract:
An imprinting system and method. An illumination system for imprinting, during a first period of time, that illuminates a first portion of boundary region that surrounds a pattern region with a thickening dosage of light that is within a first dose range, such that the fluid in the first portion of the boundary region does not solidify but does increase a viscosity of the fluid. The illumination system, during a second period of time, illuminates the pattern region with a curing dosage of light that is within a second dose range higher than the first dose range. Prior to illumination, the imprinting includes dispensing droplets and holding a template with a template chuck such that the template contact the droplets and the droplets merge and form a fluid front that spreads through the pattern region and towards the boundary region.
Public/Granted literature
- US20190179228A1 IMPRINT SYSTEM AND IMPRINTING PROCESS WITH SPATIALLY NON-UNIFORM ILLUMINATION Public/Granted day:2019-06-13
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