Invention Grant
- Patent Title: Low force wafer test probe with variable geometry
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Application No.: US16288977Application Date: 2019-02-28
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Publication No.: US10663487B2Publication Date: 2020-05-26
- Inventor: David M. Audette , Dennis R. Conti , Marc D. Knox , Grant W. Wagner
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Erik Johnson
- Main IPC: G01R1/073
- IPC: G01R1/073 ; G01R31/28

Abstract:
A system for testing functionality of die on a wafer including a plurality of contacts includes a support structure and a plurality of probes mounted to the support structure in an array. A configuration of each of the plurality of probes varies based on a position of the probe within the array to maintain uniform engagement between the plurality of probes and a corresponding plurality of contacts across the array.
Public/Granted literature
- US20190195913A1 LOW FORCE WAFER TEST PROBE WITH VARIABLE GEOMETRY Public/Granted day:2019-06-27
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